Issued Patents 2023
Showing 1–4 of 4 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11814725 | Method of cleaning, method of manufacturing semiconductor device, substrate processing apparatus, and recording medium | Koei KURIBAYASHI, Hiroyuki Miyagishi, Hiroto Yamagishi | 2023-11-14 |
| 11784044 | Method of processing substrate, method of manufacturing semiconductor device, substrate processing apparatus, and recording medium | Kiyohisa ISHIBASHI | 2023-10-10 |
| 11753716 | Method of processing substrate, substrate processing apparatus, recording medium, and method of manufacturing semiconductor device | Hiroki HATTA, Koei KURIBAYASHI, Shin SONE | 2023-09-12 |
| 11542601 | Substrate processing apparatus and method of manufacturing semiconductor device | Hidenari Yoshida, Hiroaki Hiramatsu | 2023-01-03 |