Issued Patents 2023
Showing 1–4 of 4 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11814725 | Method of cleaning, method of manufacturing semiconductor device, substrate processing apparatus, and recording medium | Takeo Hanashima, Hiroyuki Miyagishi, Hiroto Yamagishi | 2023-11-14 |
| 11788188 | Cleaning method, method of manufacturing semiconductor device, and substrate processing apparatus | Naoya Miyashita, Tomoshi Taniyama | 2023-10-17 |
| 11753716 | Method of processing substrate, substrate processing apparatus, recording medium, and method of manufacturing semiconductor device | Hiroki HATTA, Takeo Hanashima, Shin SONE | 2023-09-12 |
| 11621169 | Method of manufacturing semiconductor device, recording medium, and substrate processing apparatus | Arito OGAWA, Atsuro SEINO | 2023-04-04 |