Issued Patents 2023
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11810781 | Method of processing substrate, substrate processing apparatus, recording medium, method of manufacturing semiconductor device | Tsukasa Kamakura | 2023-11-07 |
| 11784044 | Method of processing substrate, method of manufacturing semiconductor device, substrate processing apparatus, and recording medium | Takeo Hanashima | 2023-10-10 |
| 11728162 | Method of manufacturing semiconductor device, substrate processing apparatus, and recording medium | Tsukasa Kamakura, Ryota Kataoka | 2023-08-15 |