Issued Patents 2023
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11728162 | Method of manufacturing semiconductor device, substrate processing apparatus, and recording medium | Tsukasa Kamakura, Kiyohisa ISHIBASHI | 2023-08-15 |
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11728162 | Method of manufacturing semiconductor device, substrate processing apparatus, and recording medium | Tsukasa Kamakura, Kiyohisa ISHIBASHI | 2023-08-15 |