Issued Patents 2023
Showing 1–4 of 4 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11848201 | Method of manufacturing semiconductor device, recording medium, and substrate processing method | Takaaki Noda, Yoshiro Hirose | 2023-12-19 |
| 11810781 | Method of processing substrate, substrate processing apparatus, recording medium, method of manufacturing semiconductor device | Kiyohisa ISHIBASHI | 2023-11-07 |
| 11726456 | Substrate processing system | Masanori NAKAYAMA | 2023-08-15 |
| 11728162 | Method of manufacturing semiconductor device, substrate processing apparatus, and recording medium | Kiyohisa ISHIBASHI, Ryota Kataoka | 2023-08-15 |