Issued Patents 2023
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11848201 | Method of manufacturing semiconductor device, recording medium, and substrate processing method | Tsukasa Kamakura, Takaaki Noda | 2023-12-19 |
| 11699593 | Method of manufacturing semiconductor device, substrate processing method, substrate processing apparatus, and recording medium | Kimihiko NAKATANI, Ryota Ueno, Motomu DEGAI, Takashi Nakagawa, Yoshitomo HASHIMOTO | 2023-07-11 |