Issued Patents 2023
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11699593 | Method of manufacturing semiconductor device, substrate processing method, substrate processing apparatus, and recording medium | Kimihiko NAKATANI, Motomu DEGAI, Takashi Nakagawa, Yoshitomo HASHIMOTO, Yoshiro Hirose | 2023-07-11 |