Issued Patents 2023
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11726456 | Substrate processing system | Tsukasa Kamakura | 2023-08-15 |
| 11664275 | Method of manufacturing semiconductor device, substrate processing apparatus, and recording medium | Katsunori FUNAKI, Tatsushi UEDA, Yasutoshi TSUBOTA, Yuichiro TAKESHIMA, Hiroto IGAWA +1 more | 2023-05-30 |