Issued Patents 2023
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11664275 | Method of manufacturing semiconductor device, substrate processing apparatus, and recording medium | Masanori NAKAYAMA, Katsunori FUNAKI, Tatsushi UEDA, Yuichiro TAKESHIMA, Hiroto IGAWA +1 more | 2023-05-30 |