Issued Patents 2023
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11685992 | Substrate processing apparatus, quartz reaction tube and method of manufacturing semiconductor device | Yusaku OKAJIMA, Takafumi Sasaki, Shuhei Saido, Mitsunori Ishisaka, Hidetoshi Mimura | 2023-06-27 |
| 11542601 | Substrate processing apparatus and method of manufacturing semiconductor device | Takeo Hanashima, Hiroaki Hiramatsu | 2023-01-03 |