Issued Patents 2023
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11685992 | Substrate processing apparatus, quartz reaction tube and method of manufacturing semiconductor device | Yusaku OKAJIMA, Takafumi Sasaki, Hidenari Yoshida, Shuhei Saido, Mitsunori Ishisaka | 2023-06-27 |