Issued Patents 2023
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| D1003834 | Heat insulator cover of semiconductor manufacturing apparatus | — | 2023-11-07 |
| D1003243 | Heat insulator cover of semiconductor manufacturing apparatus | — | 2023-10-31 |
| 11685992 | Substrate processing apparatus, quartz reaction tube and method of manufacturing semiconductor device | Takafumi Sasaki, Hidenari Yoshida, Shuhei Saido, Mitsunori Ishisaka, Hidetoshi Mimura | 2023-06-27 |