Issued Patents 2023
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11591694 | Method of manufacturing semiconductor device, method of processing substrate, substrate processing apparatus, and recording medium | Shinya Ebata | 2023-02-28 |
| 11542601 | Substrate processing apparatus and method of manufacturing semiconductor device | Hidenari Yoshida, Takeo Hanashima | 2023-01-03 |