Issued Patents 2023
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11745216 | Method for producing film | Ryo KUMEGAWA, Miki Tamada, Ken MARUYAMA, Motohiro SHIRATANI | 2023-09-05 |
| 11687003 | Negative resist pattern-forming method, and composition for upper layer film formation | Taiichi Furukawa | 2023-06-27 |
| 11603459 | Resin composition and method of forming resist pattern | Tomohiko SAKURAI, Hiromitsu Nakashima | 2023-03-14 |