Issued Patents 2023
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11745216 | Method for producing film | Ryo KUMEGAWA, Sosuke Osawa, Ken MARUYAMA, Motohiro SHIRATANI | 2023-09-05 |
| 11603480 | Composition for underlayer film formation, underlayer film for directed self-assembled film and forming method thereof, and directed self-assembly lithography process | Hiroyuki Komatsu, Motohiro SHIRATANI | 2023-03-14 |
| 11578230 | Composition, polymer, and method of producing substrate | Hiroyuki Komatsu, Ryo KUMEGAWA, Tatsuya Sakai | 2023-02-14 |