Issued Patents 2023
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11796912 | Radiation-sensitive composition and pattern-forming method | — | 2023-10-24 |
| 11745216 | Method for producing film | Ryo KUMEGAWA, Sosuke Osawa, Miki Tamada, Ken MARUYAMA | 2023-09-05 |
| 11603480 | Composition for underlayer film formation, underlayer film for directed self-assembled film and forming method thereof, and directed self-assembly lithography process | Hiroyuki Komatsu, Miki Tamada | 2023-03-14 |