Issued Patents 2023
Showing 1–4 of 4 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11745216 | Method for producing film | Ryo KUMEGAWA, Sosuke Osawa, Miki Tamada, Motohiro SHIRATANI | 2023-09-05 |
| 11747725 | Radiation-sensitive resin composition and method for forming resist pattern | — | 2023-09-05 |
| 11609495 | Radiation-sensitive resin composition and resist pattern-forming method | Katsuaki NISHIKORI, Kazuya KIRIYAMA, Takuhiro Taniguchi | 2023-03-21 |
| 11592746 | Radiation-sensitive resin composition, resist pattern-forming method, compound and method of generating acid | Kazuya KIRIYAMA, Katsuaki NISHIKORI, Takuhiro Taniguchi | 2023-02-28 |