Issued Patents 2023
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11609495 | Radiation-sensitive resin composition and resist pattern-forming method | Kazuya KIRIYAMA, Takuhiro Taniguchi, Ken MARUYAMA | 2023-03-21 |
| 11592746 | Radiation-sensitive resin composition, resist pattern-forming method, compound and method of generating acid | Kazuya KIRIYAMA, Takuhiro Taniguchi, Ken MARUYAMA | 2023-02-28 |