Issued Patents 2023
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11681222 | Fluorine-containing polymer, purification method, and radiation-sensitive resin composition | Hiroki Nakagawa, Gouji Wakamatsu, Kentarou Gotou, Yukio Nishimura, Takeo Shioya | 2023-06-20 |
| 11603459 | Resin composition and method of forming resist pattern | Tomohiko SAKURAI, Sosuke Osawa | 2023-03-14 |