Issued Patents 2023
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11681222 | Fluorine-containing polymer, purification method, and radiation-sensitive resin composition | Hiromitsu Nakashima, Gouji Wakamatsu, Kentarou Gotou, Yukio Nishimura, Takeo Shioya | 2023-06-20 |
| 11667620 | Composition, film, film-forming method and patterned substrate-producing method | Hiroki Nakatsu, Kazunori Takanashi, Kazunori Sakai, Yuushi MATSUMURA | 2023-06-06 |