Issued Patents 2023
Showing 1–6 of 6 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11834744 | Ceramic showerheads with conductive electrodes | Laksheswar Kalita, Dmitry Lubomirsky, Tien Fak Tan, LokKee Loh, Saravjeet Singh +1 more | 2023-12-05 |
| 11735441 | Systems and methods for improved semiconductor etching and component protection | Tien Fak Tan, Lok Kee Loh, Dmitry Lubomirsky, Soonwook Jung, Martin Yue Choy | 2023-08-22 |
| 11728139 | Process chamber for cyclic and selective material removal and etching | Toan Q. Tran, Junghoon Kim, Dmitry Lubomirsky | 2023-08-15 |
| 11591693 | Ceramic showerheads with conductive electrodes | Laksheswar Kalita, Dmitry Lubomirsky, Tien Fak Tan, LokKee Loh, Saravjeet Singh +1 more | 2023-02-28 |
| 11594428 | Low temperature chuck for plasma processing systems | Toan Q. Tran, Zilu Weng, Dmitry Lubomirsky, Satoru Kobayashi, Tae Seung Cho +2 more | 2023-02-28 |
| 11562890 | Corrosion resistant ground shield of processing chamber | Dmitry Lubomirsky, Xiao-Ming He, Jennifer Y. Sun, Xiaowei Wu, Laksheswar Kalita | 2023-01-24 |