Issued Patents 2023
Showing 1–6 of 6 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11784033 | Methods and apparatus for processing a substrate | Mengxue Wu, Jay Min Soh, Yue Cui, Chul Nyoung Lee, Palaniappan Chidambaram +1 more | 2023-10-10 |
| 11761078 | Methods and apparatus for processing a substrate | Mengxue Wu, Jay Min Soh | 2023-09-19 |
| 11674216 | Methods and apparatus for depositing aluminum by physical vapor deposition (PVD) with controlled cooling | Yaoying ZHONG, Xinxin Wang, Zheng Min Clarence Chong | 2023-06-13 |
| 11670485 | Methods and apparatus for depositing aluminum by physical vapor deposition (PVD) | Zhong Yaoying, Xinxin Wang | 2023-06-06 |
| 11581167 | Process kit having tall deposition ring and smaller diameter electrostatic chuck (ESC) for PVD chamber | David Gunther, Kirankumar Neelasandra SAVANDAIAH | 2023-02-14 |
| 11557499 | Methods and apparatus for prevention of component cracking using stress relief layer | Yuichi Wada, Kok Wei Tan, Chul Nyoung Lee, Xinxin Wang, Zheng Min Clarence Chong +2 more | 2023-01-17 |