Issued Patents 2023
Showing 1–4 of 4 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11715625 | Semiconductor processing chamber | Greg Toland, Laksheswar Kalita, Dmitry Lubomirsky | 2023-08-01 |
| 11587765 | Plasma ignition optimization in semiconductor processing chambers | Soonwook Jung | 2023-02-21 |
| 11581165 | Multi-zone gas distribution systems and methods | Saravjeet Singh, Alan Tso, Marlin Wijekoon, Dimitri Kioussis | 2023-02-14 |
| 11557464 | Semiconductor chamber coatings and processes | Laksheswar Kalita, Son T. Nguyen, Dmitry Lubomirsky | 2023-01-17 |