Issued Patents 2023
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11823927 | Wafer inspection apparatus and system including the same | Kyunghun Han, Sangwoo Bae, Jungchul Lee, Minhwan Seo, Myeongock Ko +3 more | 2023-11-21 |
| 11823961 | Substrate inspection system and method of manufacturing semiconductor device using substrate inspection system | Eunhee Jeang, BORIS AFINOGENOV, Sangwoo Bae, Wondon Joo, Maksim Riabko +7 more | 2023-11-21 |