Issued Patents 2023
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11833637 | Control of steam generation for chemical mechanical polishing | Hari Soundararajan, Shou-Sung Chang, Calvin Spencer Lee, Jonathan P. Domin, Shuchivrat Datar +3 more | 2023-12-05 |
| 11717936 | Methods for a web-based CMP system | Jeonghoon Oh, Gerald Alonzo, Jonathan P. Domin, Steven M. Zuniga, Jay Gurusamy | 2023-08-08 |
| 11693435 | Ethercat liquid flow controller communication for substrate processing systems | Ricardo L. Martinez, Hung Xuan Hoang, Farooq Aleem, Jagan Rangarajan, William Wadsworth +1 more | 2023-07-04 |