Issued Patents 2023
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11798845 | Methods and apparatus for low resistivity and stress tungsten gap fill | Xi Cen, Kai Wu, Min Heon, Wei Min Chan, Tom Ho Wing Yu +4 more | 2023-10-24 |
| 11572618 | Method and chamber for backside physical vapor deposition | Jothilingam Ramalingam, Xiaozhou Che, Yong Cao, Shane Lavan | 2023-02-07 |