Issued Patents 2023
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11704463 | Method of etch model calibration using optical scatterometry | Ye Feng, Marcus Musselman, Mehmet Derya Tetiker, Saravanapriyan Sriraman, Yan Zhang +1 more | 2023-07-18 |
| 11670486 | Pulsed plasma chamber in dual chamber configuration | Alexei Marakhtanov, Rajinder Dhindsa, Eric A. Hudson | 2023-06-06 |
| 11594400 | Multi zone gas injection upper electrode system | Ryan Bise, Rajinder Dhindsa, Alexei Marakhtanov, Lumin Li, Sang Ki Nam +6 more | 2023-02-28 |