Issued Patents 2023
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11732355 | Method and apparatus for supplying improved gas flow to a processing volume of a processing chamber | Vishwas Kumar Pandey, Eric Kihara Shono, Kartik Shah, Christopher S. Olsen, Tobin Kaufman-Osborn +2 more | 2023-08-22 |
| 11615944 | Remote plasma oxidation chamber | Christopher S. Olsen, Eric Kihara Shono, Lara Hawrylchak, Chaitanya A. PRASAD, Sairaju Tallavarjula | 2023-03-28 |