Issued Patents 2023
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11837534 | Substrate with variable height conductive and dielectric elements | Aleksandar Aleksov, Kristof Darmawikarta, Haobo Chen, Sri Ranga Sai Boyapati, Bai Nie | 2023-12-05 |
| 11644757 | Method to achieve tilted patterning with a through resist thickness using projection optics | Jianyong Mo, Liang Zhang | 2023-05-09 |
| 11586112 | Method to achieve tilted patterning with a through resist thickness | Allan Ketelsen | 2023-02-21 |