Issued Patents 2023
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11644757 | Method to achieve tilted patterning with a through resist thickness using projection optics | Changhua Liu, Liang Zhang | 2023-05-09 |
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11644757 | Method to achieve tilted patterning with a through resist thickness using projection optics | Changhua Liu, Liang Zhang | 2023-05-09 |