Issued Patents 2023
Showing 1–4 of 4 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11703758 | Photosensitive composition for EUV light, pattern forming method, and method for manufacturing electronic device | Michihiro SHIRAKAWA, Hironori OKA | 2023-07-18 |
| 11656548 | Actinic ray-sensitive or radiation-sensitive resin composition, resist film, pattern forming method, mask blank with resist film, method for producing photomask, and method for manufacturing electronic device | Tomotaka Tsuchimura, Takashi Kawashima, Akihiro Kaneko, Michihiro Ogawa, Michihiro SHIRAKAWA +1 more | 2023-05-23 |
| 11640113 | Actinic ray-sensitive or radiation-sensitive resin composition, pattern forming method, and method of manufacturing electronic device | Hideaki Tsubaki, Akihiro Kaneko, Wataru Nihashi, Shuji Hirano | 2023-05-02 |
| 11604414 | Photosensitive composition for EUV light, pattern forming method, and method for manufacturing electronic device | Michihiro SHIRAKAWA, Mitsuhiro Fujita, Tomotaka Tsuchimura, Takashi Kawashima, Michihiro Ogawa +3 more | 2023-03-14 |