Issued Patents 2023
Showing 1–5 of 5 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11703758 | Photosensitive composition for EUV light, pattern forming method, and method for manufacturing electronic device | Hajime Furutani, Hironori OKA | 2023-07-18 |
| 11656548 | Actinic ray-sensitive or radiation-sensitive resin composition, resist film, pattern forming method, mask blank with resist film, method for producing photomask, and method for manufacturing electronic device | Tomotaka Tsuchimura, Takashi Kawashima, Akihiro Kaneko, Michihiro Ogawa, Hajime Furutani +1 more | 2023-05-23 |
| 11604414 | Photosensitive composition for EUV light, pattern forming method, and method for manufacturing electronic device | Hajime Furutani, Mitsuhiro Fujita, Tomotaka Tsuchimura, Takashi Kawashima, Michihiro Ogawa +3 more | 2023-03-14 |
| 11584810 | Actinic ray-sensitive or radiation-sensitive resin composition, actinic ray-sensitive or radiation-sensitive film, pattern forming method, method of manufacturing electronic device, compound, and resin | Akira Takada, Ryo Nishio, Akiyoshi GOTO, Naohiro TANGO, Kazuhiro Marumo +1 more | 2023-02-21 |
| 11573491 | Negative tone photosensitive composition for EUV light, pattern forming method, and method for manufacturing electronic device | Wataru Nihashi, Michihiro Ogawa | 2023-02-07 |