Issued Patents 2023
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11640113 | Actinic ray-sensitive or radiation-sensitive resin composition, pattern forming method, and method of manufacturing electronic device | Hideaki Tsubaki, Hajime Furutani, Akihiro Kaneko, Shuji Hirano | 2023-05-02 |
| 11573491 | Negative tone photosensitive composition for EUV light, pattern forming method, and method for manufacturing electronic device | Michihiro SHIRAKAWA, Michihiro Ogawa | 2023-02-07 |