Issued Patents 2023
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11640113 | Actinic ray-sensitive or radiation-sensitive resin composition, pattern forming method, and method of manufacturing electronic device | Hajime Furutani, Akihiro Kaneko, Wataru Nihashi, Shuji Hirano | 2023-05-02 |