Issued Patents 2023
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11656548 | Actinic ray-sensitive or radiation-sensitive resin composition, resist film, pattern forming method, mask blank with resist film, method for producing photomask, and method for manufacturing electronic device | Takashi Kawashima, Akihiro Kaneko, Michihiro Ogawa, Michihiro SHIRAKAWA, Hajime Furutani +1 more | 2023-05-23 |
| 11604412 | Actinic ray-sensitive or radiation-sensitive resin composition, resist film, pattern forming method, and method for manufacturing electronic device | Akihiro Kaneko, Junichi Ito, Takashi Kawashima, Michihiro Ogawa | 2023-03-14 |
| 11604414 | Photosensitive composition for EUV light, pattern forming method, and method for manufacturing electronic device | Michihiro SHIRAKAWA, Hajime Furutani, Mitsuhiro Fujita, Takashi Kawashima, Michihiro Ogawa +3 more | 2023-03-14 |