Issued Patents 2023
Showing 1–6 of 6 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11801598 | Substrate transport apparatus with multiple movable arms utilizing a mechanical switch mechanism | Christopher Hofmeister, Krysztof A. Majczak, Martin Hosek, Jay Krishnasamy | 2023-10-31 |
| 11764093 | Automatic wafer centering method and apparatus | Leigh F. Sharrock | 2023-09-19 |
| 11613002 | Dual arm robot | Robert T. Caveney, Martin R. Elliot, Christopher Hofmeister | 2023-03-28 |
| 11610787 | Load lock fast pump vent | Christopher Hofmeister, Martin R. Elliott, Joseph Hallisey, Joseph A. Kraus, William J. Fosnight +3 more | 2023-03-21 |
| 11587813 | Substrate transport apparatus | Robert T. Caveney, Ulysses Gilchrist | 2023-02-21 |
| 11569111 | Substrate processing apparatus | Joseph Hallisey, Kevin M. Bourbeau, Emilien Audebrand | 2023-01-31 |