Issued Patents 2023
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11610787 | Load lock fast pump vent | Christopher Hofmeister, Martin R. Elliott, Alexander Krupyshev, Joseph A. Kraus, William J. Fosnight +3 more | 2023-03-21 |
| 11569111 | Substrate processing apparatus | Alexander Krupyshev, Kevin M. Bourbeau, Emilien Audebrand | 2023-01-31 |