Issued Patents 2023
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11569111 | Substrate processing apparatus | Alexander Krupyshev, Joseph Hallisey, Kevin M. Bourbeau | 2023-01-31 |
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11569111 | Substrate processing apparatus | Alexander Krupyshev, Joseph Hallisey, Kevin M. Bourbeau | 2023-01-31 |