Issued Patents 2023
Showing 1–7 of 7 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11799346 | Sealed robot drive | Jairo T. Moura, Ulysses Gilchrist | 2023-10-24 |
| 11772261 | Compact direct drive spindle | — | 2023-10-03 |
| 11691267 | Substrate processing apparatus | Vincent W. Tsang | 2023-07-04 |
| 11658051 | Substrate transport | Daniel Babbs, Robert C. May, Krzysztof A Majczak | 2023-05-23 |
| 11613002 | Dual arm robot | Alexander Krupyshev, Martin R. Elliot, Christopher Hofmeister | 2023-03-28 |
| 11587813 | Substrate transport apparatus | Ulysses Gilchrist, Alexander Krupyshev | 2023-02-21 |
| 11545380 | Transport apparatus with linear bearing | Daniel Babbs, Robert C. May | 2023-01-03 |