Issued Patents 2023
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11823944 | Substrate processing apparatus | Charles W. Su | 2023-11-21 |
| 11776834 | On the fly automatic wafer centering method and apparatus | Bing Yin, Jairo T. Moura, Aaron Gawlik, Nathan Spiker | 2023-10-03 |
| 11691267 | Substrate processing apparatus | Robert T. Caveney | 2023-07-04 |