Issued Patents 2023
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11764093 | Automatic wafer centering method and apparatus | Alexander Krupyshev | 2023-09-19 |
| 11664259 | Process apparatus with on-the-fly substrate centering | — | 2023-05-30 |
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11764093 | Automatic wafer centering method and apparatus | Alexander Krupyshev | 2023-09-19 |
| 11664259 | Process apparatus with on-the-fly substrate centering | — | 2023-05-30 |