Issued Patents 2023
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11715621 | Scanned angled etching apparatus and techniques providing separate co-linear radicals and ions | Peter F. Kurunczi, Morgan Evans, Joseph C. Olson, James P. Buonodono | 2023-08-01 |
| 11574800 | Extreme edge uniformity control | Alexandre Likhanskii, Maureen Petterson, John Hautala, Anthony Renau, Costel Biloiu | 2023-02-07 |