Issued Patents 2023
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11715621 | Scanned angled etching apparatus and techniques providing separate co-linear radicals and ions | Peter F. Kurunczi, Morgan Evans, Joseph C. Olson, Christopher A. Rowland | 2023-08-01 |