Issued Patents 2023
Showing 1–4 of 4 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11810746 | Variable thickness ion source extraction plate | Alexandre Likhanskii, Alexander S. Perel, Jay T. Scheuer, Bon-Woong Koo, Robert C. Lindberg +1 more | 2023-11-07 |
| 11715621 | Scanned angled etching apparatus and techniques providing separate co-linear radicals and ions | Morgan Evans, Joseph C. Olson, Christopher A. Rowland, James P. Buonodono | 2023-08-01 |
| 11662524 | Forming variable depth structures with laser ablation | Joseph C. Olson, Morgan Evans, Rutger Meyer Timmerman Thijssen | 2023-05-30 |
| 11587778 | Electrodynamic mass analysis with RF biased ion source | Alexandre Likhanskii, Joseph C. Olson, Frank Sinclair | 2023-02-21 |