Issued Patents 2023
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11574800 | Extreme edge uniformity control | Alexandre Likhanskii, John Hautala, Anthony Renau, Christopher A. Rowland, Costel Biloiu | 2023-02-07 |
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11574800 | Extreme edge uniformity control | Alexandre Likhanskii, John Hautala, Anthony Renau, Christopher A. Rowland, Costel Biloiu | 2023-02-07 |