Issued Patents 2023
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11574800 | Extreme edge uniformity control | Alexandre Likhanskii, Maureen Petterson, John Hautala, Christopher A. Rowland, Costel Biloiu | 2023-02-07 |
| 11569063 | Apparatus, system and method for energy spread ion beam | Paul J. Murphy, Frank Sinclair, Jun Lu, Daniel R. Tieger | 2023-01-31 |