Issued Patents 2023
Showing 1–4 of 4 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11828344 | Support, vibration isolation system, lithographic apparatus, object measurement apparatus, device manufacturing method | Jeroen Johan Maarten Van De Wijdeven, Jeroen Pieter Starreveld, Stan Henricus Van Der Meulen | 2023-11-28 |
| 11762281 | Membrane for EUV lithography | Maxim Aleksandrovich Nasalevich, Erik Achilles Abegg, Nirupam Banerjee, Michiel Blauw, Derk Servatius Gertruda Brouns +17 more | 2023-09-19 |
| 11754918 | Pellicle and pellicle assembly | David Ferdinand Vles, Chaitanya Krishna ANDE, Antonius Franciscus Johannes De Groot, Adrianus Johannes Maria Giesbers, Johannes Joseph Janssen +18 more | 2023-09-12 |
| 11592756 | Assembly comprising a cryostat and layer of superconducting coils and motor system provided with such an assembly | Hessel Bart Koolmees | 2023-02-28 |