Issued Patents 2023
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11828344 | Support, vibration isolation system, lithographic apparatus, object measurement apparatus, device manufacturing method | Jeroen Johan Maarten Van De Wijdeven, Johannes Petrus Martinus Bernardus Vermeulen, Stan Henricus Van Der Meulen | 2023-11-28 |
| 11550227 | Projection system and lithographic apparatus comprising said projection system | Marinus Engelbertus Cornelis MUTSAERS, Robertus Johannes Marinus De Jongh | 2023-01-10 |