Issued Patents 2023
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11828344 | Support, vibration isolation system, lithographic apparatus, object measurement apparatus, device manufacturing method | Jeroen Johan Maarten Van De Wijdeven, Johannes Petrus Martinus Bernardus Vermeulen, Jeroen Pieter Starreveld | 2023-11-28 |