Issued Patents 2023
Showing 1–5 of 5 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11762281 | Membrane for EUV lithography | Maxim Aleksandrovich Nasalevich, Erik Achilles Abegg, Nirupam Banerjee, Michiel Blauw, Derk Servatius Gertruda Brouns +17 more | 2023-09-19 |
| 11754918 | Pellicle and pellicle assembly | Chaitanya Krishna ANDE, Antonius Franciscus Johannes De Groot, Adrianus Johannes Maria Giesbers, Johannes Joseph Janssen, Paul Janssen +18 more | 2023-09-12 |
| 11686997 | Metal-silicide-nitridation for stress reduction | Pieter-Jan Van Zwol, Adrianus Johannes Maria Giesbers, Johan Hendrik Klootwijk, Evgenia KURGANOVA, Maxim Aleksandrovich Nasalevich +4 more | 2023-06-27 |
| 11673169 | Membrane cleaning apparatus | Andrey Nikipelov, Dmitry KURILOVICH, Fabio SBRIZZAI, Marcus Adrianus Van De Kerkhof, Ties Wouter VAN DER WOORD +2 more | 2023-06-13 |
| 11556063 | Substrate support, lithographic apparatus and loading method | Johannes Onvlee, Antonius Franciscus Johannes De Groot, Wim Symens | 2023-01-17 |